Mo含量對CrMoAlN薄膜微觀結(jié)構(gòu)和摩擦磨損性能的影響
發(fā)布人：上海艾荔艾合金股份有限公司www.shailiai.cn
更新時(shí)間：2016-03-21
采用非平衡磁控濺射離子鍍技術(shù)在 M2 工具鋼和單晶 Si 表面沉積多元 CrMoAlN 納米多層薄膜. 利用 EDS, SEM, XRD, XPS, 納米壓痕儀和銷盤磨損試驗(yàn)儀研究 Mo 含量對CrMoAlN薄膜成分、表面和截面形貌、相結(jié)構(gòu)、化學(xué)價(jià)態(tài)、顯微硬度和摩擦性能的影響.
Mo含量對CrMoAlN薄膜微觀結(jié)構(gòu)和摩擦磨損性能的影響EFFECTS OF Mo CONTENT ON THE?ICROSTRUCTURE AND TRIBOLOGICAL PROPERTIES?OF CrMoAlN FILMS采用非平衡磁控濺射離子鍍技術(shù)在 M2 工具鋼和單晶 Si 表面沉積多元 CrMoAlN 納米多層薄膜. 利用 EDS, SEM, XRD, XPS, 納米壓痕儀和銷盤磨損試驗(yàn)儀研究 Mo 含量對CrMoAlN薄膜成分、表面和截面形貌、相結(jié)構(gòu)、化學(xué)價(jià)態(tài)、顯微硬度和摩擦性能的影響. 結(jié)果表明, 不同 Mo 含量的 CrMoAlN 薄膜均為 fcc 結(jié)構(gòu), Mo 代替了 CrAlN 晶格中部分 Cr 或Al 的位置, 形成了以 fcc-CrN 相為基礎(chǔ)的 CrMoAlN 置換固溶體. 隨著 Mo 含量提高,?CrMoAlN 薄膜表面顆粒尺寸明顯減小, 截面柱狀晶結(jié)構(gòu)逐漸消失. CrMoAlN 薄膜的顯微硬度和彈性模量隨著 Mo 含量的增加而提高, 摩擦系數(shù)和磨損率隨著 Mo 含量的提高而降低.?Mo含量為19.47% (原子分?jǐn)?shù))時(shí), 顯微硬度與彈性模量均達(dá)到最大值29.70和427.53 GPa, 摩擦系數(shù)和磨損率達(dá)到最小值 0.271和 1.2×10-16 m3/(N?m).?
In recent decades, CrAlN coatings have been widely used for cutting tools due to?their high hardness, good wear resistance, especially excellent thermal stability and oxidation?resistance. However, the rapid development in high speeds and dry cutting applications demands?further improvement in hardness and wear properties of CrAlN coatings. Mo nitrides coatings are?commonly used as protective surface layers against wear and corrosion. The combination of?CrAlN and Mo may lead to the development of new composite coatings with superior wear?properties. In this study, the CrMoAlN multilayer coatings with different Mo contents were?deposited on M2 tool steel and silicon wafers substrates by closed-field unbalanced magnetron?sputtering ion plating (CFUMSIP) technique in a gas mixture of Ar+N2. The chemical?composition, surface and cross sectional morphologies, microstructure, mechanical and?tribological properties of coatings were studied by EDS, SEM, XRD, XPS, nano-indentation and?pin-on-disk tribometer, respectively. The results indicate that the CrMoAlN coatings exhibit fcc?structure. Mo atoms substitute Cr and/or Al atoms in CrAlN lattice forming the solid solution?CrMoAlN coatings. The surface and cross-sectional morphologies of the CrMoAlN coatings show?that the grain sizes and the column widths decrease with the increasing of Mo content.?Nano-indentation result reveals a promoted hardness and elastic modulus of the CrMoAlN?coatings with enhanced Mo content from 0 to 19.47% (atomic fraction) due to the solid solution?strengthening and grain size diminishment. A maximum hardness and elastic modulus of the?coatings are found to be 29.70 and 427.53 GPa when the Mo content reached to 19.47%. The?average friction coefficient and wear rate were observed to decrease with the increase of Mo?content and the lowest values were 0.271 and 1.2×10-16 m3/(N?m), respectively, at 19.47%Mo.
作為值得信賴的合作伙伴和高品質(zhì)金屬合金的半成品供應(yīng)商，艾荔艾擁有完善的服務(wù)體系和專業(yè)的團(tuán)隊(duì)。在同客戶交易的過程中，我們力求根據(jù)不同的應(yīng)用需求將我們的產(chǎn)品做到精益求精。針對當(dāng)前和未來的市場需求，艾荔艾致力于為客戶提供最佳的金屬材料解決方案。
AILIAI has been a reliable partner and supplier of sophisticated and high-quality semi-finished products maed of alloys. In dialogue with our customers, we optimise our products to meet the specific application requirements. AILIAI develops the best alloy material solutions for current and future challenges.
獲取更多我們供應(yīng)的合金和服務(wù)信息，請致電086-021-67660801或發(fā)電子郵件kefu@ailiaigroup.com聯(lián)系我們，您也可以通過微博，微信，領(lǐng)英，XING，臉書和推特與我們互動(dòng)。
For more information on the alloys and services that we supply,?call us?at 086-021-67660801 or email us at kefu@ailiaigroup.com. You can also get in touch on social media, we are constantly active on?Weibo,?Weixin,?LinkedIn,?XING, Facebook?and?Twitter.